科研论文
[1] Xiao,Y(Xiao,Yue)1;Pan,GF(Pan,Guofeng)1;Tian,QY(Tian,Qiyuan)1;He,P(He,Ping)2;Wang,QW(Wang,Qingwei)1;Zheng,J(Zheng,Jie)1;Wang,CW(Wang,Chenwei)1. Effect of Chelating Agent and Surfactant on TaN CMP in Weakly Alkaline Slurry. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2018, 7 11, P608-P614.
[2] 李祥州1,2;潘国峰1,2;王辰伟1,2;郭学海1,2;何平3;李月1,2. 螯合剂与氧化剂协同降低CMP中Co /Cu电偶腐蚀. 稀有金属, 2018, 42 3, 278-284.
[3] Miao,YX(Miao,Yuxin)1;Pan,GF(Pan,Guofeng)2;Sun,C(Sun,Caixuan)1;He,PL(He,Ping)3;Cao,G(Cao,Guanlong)1;Luo,C(Luo,Chao)1;Zhang,L(Zhang,Li)1;Li,HL(Li,Hongliang)4. Enhanced photoelectric responses induced by visible light of acetone gas sensors based on CuO-ZnO nanocomposites at about room temperature. SENSOR REVIEW, 2018, 38 3, 311-320.
[4] Sun,CX(Sun,Caixuan)1;He,P(He,Ping)2;Pan,GF(Pan,Guofeng)1;Miao,YX(Miao,Yuxin)1;Zhang,T(Zhang,Tian)1;Zhang,L(Zhang,Li)1. Study on preparation and visible-light activity of Ag-TiO2 supported by artificial zeolite. RESEARCH ON CHEMICAL INTERMEDIATES, 2018, 44 4, 2607-2620.
[5] 韩欣玉1;何平1;潘国峰2;刘一赛1;张万发1. 基于PSO-SVR的压力传感器温度补偿. 仪表技术与传感器, 2018, 8, 9-12.
[6] 季军1,2;何平3;潘国峰1,2;王辰伟1,2;张文倩1,2;杜义琛1,2. CMP工艺对Co/Cu去除速率及速率选择比的影响研究. 微电子学, 2018, 48 5, 699-704.
[7] 缪玉欣. ZnO纳米复合材料的制备及其丙酮气敏特性研究. , 2018, 潘国峰, .
[8] 季军. 基于SVM的GLSI多层铜布线Co阻挡层CMP的研究. , 2018, 潘国峰, .
[9] 孙彩旋. 人造沸石负载型二氧化钛光催化剂的制备及其特性研究. , 2018, 潘国峰, .
[10] Ji,J(Ji,Jun)1;Pan,GF(Pan,Guofeng)1;Zhang,WQ(Zhang,Wenqian)1;Du,YC(Du,Yichen)1;He,P(He,Ping)2;Tian,Y(Tian,Ye)3;Wang,CW(Wang,Chenwei)1. Role of Additive in Alkaline Slurries for Co CMP. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017, 6 12, P813-P818.