科研论文
[1] 何平1;,罗萌1;,韩欣玉1;,郭文艺2;,潘国峰1;. 基于PSO-SVM模型的Cu CMP抛光液组分优化. 微电子学, 2020, 50 5, 694-698.
[2] 崔军蕊. 高灵敏度低温ZnO基丙酮气敏传感器的研究. , 2020, 潘国峰, .
[3] 齐嘉城. 铜互连钽阻挡层CMP及其电化学腐蚀特性研究. , 2020, 潘国峰,王辰伟, .
[4] 黄超. GLSI多层铜布线Co阻挡层CMP及电化学特性的研究. , 2020, 潘国峰, .
[5] Hu,LJ(Hu,Lianjun)1,2;Pan,GF(Pan,Guofeng)1,2;Wang,H(Wang,Hao)1,2;Xu,Y(Xu,Yi)1,2;Wang,R(Wang,Ru)1,2. The synergistic inhibitory effect and density functional theory study of 2,2 '-[[(Methyl-1H-benzotriazol-1-yl)methyl]imino] bisethanol and potassium oleate on copper in H2O2 based alkaline slurries. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2020, 603 , .
[6] 曹冠龙1;,李铁2;,潘国峰3;,杨学莉3;,王如3;,崔军蕊3;,回广泽3;. 掺杂金属氧化物半导体气敏传感器性能的研究进展. 光电技术应用, 2020, 35 6, 15-22,27.
[7] Hu,LJ(Hu,Lianjun)1,2;Pan,GF(Pan,Guofeng)1,2;Xu,Y(Xu,Yi)1,2;Wang,H(Wang,Hao)1,2;Zhang,YW(Zhang,Yiwen)1,2;Wang,R(Wang,Ru)1,2;Wang,CW(Wang,Chenwei)1,2. The Effect of Hydroxyethylidene Diphosphonic Acid on the Chemical Mechanical Polishing of Cobalt in H2O2 Based Alkaline Slurries. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2020, 9 3, .
[8] Hu,LJ(Hu,Lianjun)1,2;Pan,GF(Pan,Guofeng)1,2;Wang,H(Wang,Hao)1,2;Zhang,XB(Zhang,Xinbo)1,2;Wang,ZY(Wang,Ziyan)1,2;Zhu,TT(Zhu,Tiantian)1,2. The synergy and DFT study of TT-LYK and potassium oleate on chemical mechanical polishing of cobalt in alkaline medium. MATERIALS CHEMISTRY AND PHYSICS, 2020, 256 , .
[9] Hu,LJ(Hu,Lianjun)1;Pan,GF(Pan,Guofeng)1;Zhang,XB(Zhang,Xinbo)1;He,P(He,Ping)2;Wang,CW(Wang,Chenwei)1. Inhibition Effect of TT-LYK on Cu Corrosion and Galvanic Corrosion between Cu and Co during CMP in Alkaline Slurry. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2019, 8 8, P437-P447.
[10] 韩楠. 高灵敏ZnO基厚膜丙酮气敏传感器的制备及其特性的研究. , 2019, 潘国峰, .